Title:
FURNACE-MOUTH AIR-INTAKE STRUCTURE OF PECVD DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/201717
Kind Code:
A1
Abstract:
Disclosed in the present utility model is a furnace-mouth air-intake structure of a PECVD device. The furnace-mouth air-intake structure comprises a flange; the outer side wall of the flange is provided thereon with a plurality of outer air intake pipes; the inner side wall of the flange is mounted thereon with a plurality of inner air intake pipes, from top to bottom; each of the inner air intake pipe extends in a circumferential direction of the inner side wall of the flange; one end of each inner air intake pipe is an intake end, and the other end thereof is a closed end; the air intake end of each inner intake pipe is in communication with the air outlet end of one outer air intake pipe; and a plurality of air outlet holes facing the center of the flange are uniformly provided on the pipe wall of each inner air intake pipe and distributed in the circumferential direction of the inner air intake pipe. The present utility model allows multiple gases to enter a reaction chamber in a uniformly mixed manner after being injected, and the desired process is easily achieved; and when it is necessary to clean or replace the furnace mouth air intake structure of the PECVD equipment, only the inner air intake pipes need to be removed; moreover, costs and resources are saved compared to the prior art where the entire flange needs to be replaced.
Inventors:
YANG BAOLI (CN)
ZHANG YONG (CN)
ZHANG YONG (CN)
Application Number:
PCT/CN2017/114883
Publication Date:
November 08, 2018
Filing Date:
December 07, 2017
Export Citation:
Assignee:
S C NEW ENERGY TECH CORPORATION (CN)
International Classes:
C23C16/455; H01L21/00
Domestic Patent References:
| WO2010039883A2 | 2010-04-08 |
Foreign References:
| CN203741411U | 2014-07-30 | |||
| US20070087296A1 | 2007-04-19 | |||
| CN201785488U | 2011-04-06 | |||
| CN100336165C | 2007-09-05 | |||
| CN102206813A | 2011-10-05 | |||
| CN201778112U | 2011-03-30 | |||
| CN204490990U | 2015-07-22 | |||
| US20100048022A1 | 2010-02-25 |
Attorney, Agent or Firm:
SHENZHEN KANGHONG INTELLECTUAL PROPERTY AGENT CO., LTD (CN)
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