Title:
FURNACE MOUTH HEAT INSULATION STRUCTURE FOR LOW-PRESSURE DIFFUSION FURNACE
Document Type and Number:
WIPO Patent Application WO/2018/214306
Kind Code:
A1
Abstract:
Provided is a furnace mouth heat insulation structure for a low-pressure diffusion furnace. The structure comprises a quartz tube (4) and a sealing ring (5), the sealing ring being sheathed on an outer wall of an end portion of an orifice of the quartz tube, and further comprises a tubular heat insulation layer (6), wherein the tubular heat insulation layer is arranged in the end portion of the orifice of the quartz tube, and a central axis of the tubular heat insulation layer coincides with a central axis of the quartz tube, an outer end opening of the tubular heat insulation layer extends out of the orifice of the quartz tube, and an inner end opening of the tubular heat insulation layer extends to exceed a position, corresponding the sealing ring, on an inner wall of the end portion of the orifice of the quartz tube. According to the furnace mouth heat insulation structure for a low-pressure diffusion furnace, when a charge and discharge furnace door is opened and a large amount of heat energy spills from the quartz tube, the tubular heat insulation layer achieves good functions of insulation and guiding, and the high-temperature heat energy is diffused from the tubular heat insulation layer, thus preventing the high-temperature heat energy from directly affecting the sealing ring, and prolonging the service life of the sealing ring.
Inventors:
LI ZHIWEN (CN)
ZHANG YONG (CN)
ZHANG YONG (CN)
Application Number:
PCT/CN2017/098533
Publication Date:
November 29, 2018
Filing Date:
August 22, 2017
Export Citation:
Assignee:
SHENZHEN HEADQUARTER S C NEW ENERGY TECH CORPORATION (CN)
International Classes:
H01L31/18; C30B31/10; F27D1/00
Foreign References:
| CN205035499U | 2016-02-17 | |||
| CN203947187U | 2014-11-19 | |||
| CN105543976A | 2016-05-04 | |||
| CN204874828U | 2015-12-16 | |||
| CN205011866U | 2016-02-03 | |||
| US5252062A | 1993-10-12 | |||
| JPS63285926A | 1988-11-22 | |||
| KR20060036849A | 2006-05-02 |
Attorney, Agent or Firm:
SHENZHEN HEADQUARTER: S.C NEW ENERGY TECHNOLOGY CORPORATION (CN)
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