Title:
FURNACE TUBE MOUNTING-DISMOUNTING AUXILIARY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/169216
Kind Code:
A1
Abstract:
A furnace tube mounting-dismounting auxiliary device, which is used for supporting a furnace tube (200) in a process where the furnace tube (200) of a horizontal semiconductor device is mounted on a furnace body or is dismounted from the furnace body; the furnace tube mounting-dismounting auxiliary device (100) comprises: a base (110), which is used for being detachably connected to a material loading-unloading mechanism (300) of the horizontal semiconductor device, so that the material loading-unloading mechanism (300) can drive the furnace tube mounting-dismounting auxiliary device (100) to entirely ascend and descend in a vertical direction; and a support main body (120), which is arranged on the base (110) and is able to move in a first horizontal direction relative to the base (110), the support main body (120) being provided with a rolling support structure, the rolling support structure being used for supporting the furnace tube (200), the rolling support structure being able to cause the furnace tube (200) to move in a second horizontal direction when pushed, and the furnace tube (200) cooperating in a rolling manner with the rolling support structure, wherein the second horizontal direction has a preset included angle with the first horizontal direction.
Inventors:
WANG QI (CN)
LI JIANGUO (CN)
ZHU WANGPING (CN)
LI JIANGUO (CN)
ZHU WANGPING (CN)
Application Number:
PCT/CN2023/077788
Publication Date:
September 14, 2023
Filing Date:
February 23, 2023
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
B25B27/00; B25B29/00; H01L21/22; H01L21/67
Foreign References:
| CN114505816A | 2022-05-17 | |||
| CN213731506U | 2021-07-20 | |||
| CN112573428A | 2021-03-30 | |||
| CN111168633A | 2020-05-19 | |||
| SU1206593A1 | 1986-01-23 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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