GALLIUM NITRIDE PARTICLES AND METHOD FOR PRODUCING SAME

WIPO Patent Application WO/2018/230663

A1

Provided are gallium nitride particles which make it possible to produce a gallium nitride sputtering target having a high density and high strength, have a reduced oxygen content, and have high moldability. A mixed powder of gallium oxide and gallium nitride is reacted with each other at a temperature of 1000 to 1100°C so that the ammonia reaction amount per hour can become a 1-fold molar amount or more greater than the amount of gallium introduced. As a result, gallium nitride particles can be produced, which have an oxygen content of 1 atm% or less and an average primary particle diameter of 5 μm or more, wherein the particle diameters of particles included in a 10% area % as observed from the smallest particle diameter in the particle size distribution (i.e., a 10% particle diameter) is 3 μm or less.

MESUDA MASAMI (JP)
KURAMOCHI HIDETO (JP)

PCT/JP2018/022788

December 20, 2018

June 14, 2018

Click for automatic bibliography generation  

TOSOH CORP (JP)

C01B21/06; C04B35/58; C23C14/34

WO2016158651A1

2016-10-06

JP2013129568A	2013-07-04
JP2012144424A	2012-08-02
JP2014234336A	2014-12-15
JP2015180599A	2015-10-15
JP2009520678A	2009-05-28

KIYONO, HAJIME ET AL.: "Nitridation mechanism of beta-Gallium Oxide by ammonia and fabrication of Gallium-Nitride Nano-particles and Nano-rods", JOURNAL OF THE JAPANESE ASSOCIATION OF CRYSTAL GROWTH, vol. 37, no. 4, 2010, pages 304 - 309
JANIK, J.F. ET AL.: "Tuning aerosol-assisted vapor phase processing towards low oxygen GaN powders", PHYSICA STATUS SOLIDI (A), vol. 203, no. 6, 2006, pages 1301 - 1306, XP055646942, DOI: 10.1002/pssa.200566134

View/Download PDF      PDF Help

Previous Patent: AROMATIC POLYCARBONATE RESIN, METHOD FOR PRODUCING SAME, AND AROMATIC DIHYDROXY COMPOUND

Next Patent: VALVE DEVICE