GALVANO SCANNER AND LASER MACHINING DEVICE

Title:

GALVANO SCANNER AND LASER MACHINING DEVICE

Document Type and Number:

WIPO Patent Application WO/2015/162740

Kind Code:

A1

Abstract:

Provided is a galvano scanner comprising a rotating body that is provided with a rotation shaft (3) and is capable of rotating around the rotation shaft; a scan mirror (2) which is a mirror that deflects incident light and is connected to one end at the front side of the rotation shaft; a frame case (4) provided with an inner space in which the rotating body is rotated; a front-side bearing (8) which is a bearing provided at the front side end section of the inner space and rotatably supports the rotation shaft; and a ball plunger (10) which is a vibration suppression structure that suppresses vibrations of the front-side bearing caused by the driving of the rotation shaft. The vibration suppression structure has an abutting member that abuts an outer periphery　side surface of the front-side bearing, and the abutting member is movable in accordance with displacement of the front-side bearing in an axial direction parallel to the rotation shaft.

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Inventors:

HOKODATE TOSHIYUKI (JP)
TAKAHASHI NAOHIRO (JP)
UCHIYAMA KENGO (JP)
TAKAHASHI TEIJI (JP)

Application Number:

PCT/JP2014/061490

Publication Date:

October 29, 2015

Filing Date:

April 23, 2014

Export Citation:

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Assignee:

MITSUBISHI ELECTRIC CORP (JP)

International Classes:

G02B26/10; B23K26/08

Foreign References:

JP2012027446A	2012-02-09
JP2011154196A	2011-08-11
JP2009271417A	2009-11-19
JP2006227415A	2006-08-31
JPH0694751A	1994-04-08
JP2013190669A	2013-09-26