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Title:
GALVANOMIRROR, GALVANOSCANNER USING GALVANOMIRROR, LASER PROCESSING MACHINE USING GALVANOMIRROR, AND METHOD FOR MANUFACTURING GALVANOMIRROR
Document Type and Number:
WIPO Patent Application WO/2018/189828
Kind Code:
A1
Abstract:
A galvanomirror (10) has: a mirror surface section (10A) having a mirror surface; and a rear surface reinforcing section (12) bonded to the rear surface side of the mirror surface. The mirror surface section (10A) comprises a single crystal SiC wafer, and the rear surface reinforcing section (12) is formed of a C/SiC material. Consequently, the stiffness of the mirror surface section is improved, the thickness of the mirror surface section is reduced, and the weight of the rear surface reinforcing section of the mirror surface section is reduced, thereby increasing the resonant frequency of the galvanomirror, and obtaining the galvanomirror achieving high accuracy and not being susceptible to warping even if the galvanomirror is moved at a high speed.

Inventors:
KUME MASAMI (JP)
KUMADA TERUHIKO (JP)
ITO YOHEI (JP)
KOBAYASHI HIROKI (JP)
Application Number:
PCT/JP2017/014986
Publication Date:
October 18, 2018
Filing Date:
April 12, 2017
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B26/10; B23K26/082; B41J2/47; G02B5/08; G02B26/08; H04N1/113
Foreign References:
JP2010537235A2010-12-02
JPH08240782A1996-09-17
JP2003131161A2003-05-08
JP2001116911A2001-04-27
JP2009515228A2009-04-09
JP2014016387A2014-01-30
JP2015125219A2015-07-06
JPH07181414A1995-07-21
US20140211473A12014-07-31
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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