Title:
GAS ABSORBANCE SPECTRUM MEASUREMENT DEVICE, FREQUENCY LOCKING METHOD, AND GAS ABSORBANCE SPECTRUM MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2021/048967
Kind Code:
A1
Abstract:
The gas absorbance spectrum measurement device according to one embodiment of the present invention comprises a laser irradiation unit (1), an optical resonator (2), and a first detection unit (3) that detects light extracted from the optical resonator (2). The gas absorbance spectrum measurement device obtains the component concentration of a gas being measured by cavity ring-down spectroscopy (CRDS) measurement. The laser irradiation unit (1) is provided with: a laser light source (10); a frequency conversion unit (12) that is capable of selectively emitting laser light released from the laser light source (10) with the frequency either unaltered or changed by a prescribed number of times; a frequency modulation unit (13, 14) that modulates the frequency of the emitted laser light using a modulation signal; a second detection unit (18) that detects return light for the irradiated light, the return light returning to the optical resonator (2); and a feedback control unit (191, 11) that generates an error signal corresponding to the difference between the frequency of the laser light with which the optical resonator (2) is irradiated and the mode frequency of the optical resonator (2) on the basis of the modulation signal and a detection signal produced by the second detection unit (18), and controls the resonant frequency in the laser light source (10) in accordance with the error signal.
Inventors:
MANO KAZUNE (JP)
Application Number:
PCT/JP2019/035842
Publication Date:
March 18, 2021
Filing Date:
September 12, 2019
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
G01N21/39; G01N21/3504; H01S3/10
Domestic Patent References:
| WO2014106940A1 | 2014-07-10 |
Foreign References:
| JP2015032700A | 2015-02-16 | |||
| US8154727B2 | 2012-04-10 | |||
| JP2018502289A | 2018-01-25 | |||
| US20140125993A1 | 2014-05-08 | |||
| JPH11121847A | 1999-04-30 | |||
| JP2003168841A | 2003-06-13 | |||
| JPH08204275A | 1996-08-09 | |||
| JP2019114721A | 2019-07-11 |
Attorney, Agent or Firm:
KYOTO INTERNATIONAL PATENT LAW OFFICE (JP)
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