Title:
GAS ANALYSIS DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/208048
Kind Code:
A1
Abstract:
The present invention addresses the problem of expanding the gas concentration range that can be analyzed by a gas analysis device using terahertz waves by providing a gas analysis device for analyzing a gas using terahertz waves that is characterized by having at least one light generation unit for generating terahertz-band light having a single oscillation frequency, at least two, that is, a first and second detection unit for receiving the terahertz-band light generated by the light generation unit and measuring light intensity, and a gas cell through which the terahertz-band light generated by the light generation unit passes, and in that the first and second detection units are disposed at different points on the same optical path of the terahertz-band light, portions of the light intensity of the terahertz-band light are measured by the detection units, and the gas inside the gas cell is analyzed on the basis of the light intensities at the different points that have been measured by the first and second detection units.
Inventors:
YAMAGUCHI KEITA (JP)
Application Number:
PCT/JP2015/068442
Publication Date:
December 29, 2016
Filing Date:
June 26, 2015
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01N21/3581
Foreign References:
| JP2011169637A | 2011-09-01 | |||
| JP2013167591A | 2013-08-29 | |||
| JP2011007669A | 2011-01-13 | |||
| JPS63261140A | 1988-10-27 | |||
| JP2014062892A | 2014-04-10 | |||
| US6147351A | 2000-11-14 | |||
| JP2012061232A | 2012-03-29 | |||
| JPS649339A | 1989-01-12 | |||
| JP2006145512A | 2006-06-08 | |||
| US6181426B1 | 2001-01-30 |
Attorney, Agent or Firm:
INOUE Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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