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Title:
GAS COMPONENT DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/246474
Kind Code:
A1
Abstract:
A gas component detection device (10) comprises a column (21), a sensor (23), flow paths (621, 622), and a flow path switch (22). The column (21) separates components of a detected gas. The sensor (23) is, e.g., a semiconductor sensor, and moreover is connected downstream of the column (21) and detects the components of the detected gas. The flow paths (621, 622) connect the column (21) and the sensor (23). The flow path switch (22) is positioned between the flow path (621) and the flow path (622). The flow path switch (22) executes switching between a measurement state in which the detected gas discharged from the column (21) flows into the sensor (23) and a discharge state in which the detected gas discharged from the column (21) is discharged to the exterior.

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Inventors:
ISHIDA HIDEKI (JP)
TSUDA TAKAO (JP)
Application Number:
PCT/JP2021/021147
Publication Date:
December 09, 2021
Filing Date:
June 03, 2021
Export Citation:
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Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01N30/26; G01N30/40; G01N30/64; G01N30/88
Foreign References:
JP2005315704A2005-11-10
JP2005098817A2005-04-14
JP2005221341A2005-08-18
JP2013140154A2013-07-18
Attorney, Agent or Firm:
KAEDE PATENT ATTORNEYS' OFFICE (JP)
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