Title:
GAS COMPOSITION ADJUSTMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/063132
Kind Code:
A1
Abstract:
This gas composition adjustment device is provided with an adsorber, a supply pump (310), and an exhaust pump (320). The gas composition adjustment device performs a pressurizing operation in which the supply pump (310) supplies gas to the adsorber, and a depressurizing operation in which the exhaust pump (320) exhausts gas from the adsorber. Each of the supply pump (310) and the exhaust pump (320) is a displacement pump, and has a sealing member (313, 323). The main components of the sealing member (323) of the exhaust pump (320) are a fluororesin and a fibrous carbon material.
Inventors:
IKEMIYA MAKOTO (JP)
KAMEI NORITAKA (JP)
NAKATANI HIROYUKI (JP)
KONDO KEITA (JP)
KAMEI NORITAKA (JP)
NAKATANI HIROYUKI (JP)
KONDO KEITA (JP)
Application Number:
PCT/JP2022/036902
Publication Date:
April 20, 2023
Filing Date:
October 03, 2022
Export Citation:
Assignee:
DAIKIN IND LTD (JP)
International Classes:
B01D53/047; F04B27/02
Foreign References:
| JP2016070608A | 2016-05-09 | |||
| JP2014169657A | 2014-09-18 | |||
| JP2009085051A | 2009-04-23 | |||
| JPH01262919A | 1989-10-19 | |||
| JP2013068111A | 2013-04-18 | |||
| JP2019066168A | 2019-04-25 |
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
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