Title:
GAS DISCHARGE AND SUPPLY STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2017/169830
Kind Code:
A1
Abstract:
[Problem] Provided is a structure that discharges and supplies gas through portions over a wide range of a 3D shape that facilitates the discharge of gas from a cavity and that has a high aperture ratio providing good efficiency. [Solution] This gas discharge and supply structure 1 includes a main body 2 and a porous part 3 integral with the main body 2. The main body 2 has a plurality of gas discharge and supply channels 4 formed therein. One end of the plurality of gas discharge and supply channels 4 communicate with the porous part 3. At the other end at least two of the gas discharge and supply channels 4 are aggregated to form a single path 5 opened to the outside of the main body 2. The main body 2 is formed of a porous metal that is denser than the porous part 3. Inside surfaces 4a of the gas discharge and supply channels 4 are made smooth by NC processing (not shown). This allows variations in the cross section of a gas flow passage to be precisely eliminated, thus preventing accumulation of gas residue. The distance between a surface 3a of the porous part 3 on the side communicating with the plurality of gas discharge and supply channels 4 and a surface 3b of the porous part 3 on the opposite side is approximately 4mm. A groove 6 is formed in a communication part between the gas discharge and supply channels 4 and the porous part 3.
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Inventors:
MITSUSHIMA TOSHIO (JP)
NAKASHIMA HISASHI (JP)
NAKASHIMA HISASHI (JP)
Application Number:
PCT/JP2017/010607
Publication Date:
October 05, 2017
Filing Date:
March 16, 2017
Export Citation:
Assignee:
SANKO GOSEI LTD (JP)
International Classes:
B29C45/34; B29C33/10
Foreign References:
| JPH01176530A | 1989-07-12 | |||
| JP2013125849A | 2013-06-24 | |||
| JPH08300363A | 1996-11-19 | |||
| JPH07100870A | 1995-04-18 | |||
| JPH08170107A | 1996-07-02 | |||
| JPH01210323A | 1989-08-23 | |||
| JP2012035469A | 2012-02-23 | |||
| JP2004167714A | 2004-06-17 |
Other References:
See also references of EP 3437823A4
Attorney, Agent or Firm:
KAIGUCHI Muneaki (JP)
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