Title:
GAS INJECTOR AND DIFFUSION FURNACE TUBE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/284101
Kind Code:
A1
Abstract:
A gas injector (100), which is disposed in a diffusion furnace tube device. The gas injector (100) comprises an inner cavity (110), the cavity wall of the inner cavity (110) being provided with a plurality of protruding structures (111). The plurality of protruding structures (111) are arranged in an array on the cavity wall.
Inventors:
WANG HUAIQING (CN)
Application Number:
PCT/CN2021/117528
Publication Date:
January 19, 2023
Filing Date:
September 09, 2021
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01L21/67; C23C16/455
Foreign References:
| CN111364010A | 2020-07-03 | |||
| CN204787990U | 2015-11-18 | |||
| CN208349277U | 2019-01-08 | |||
| CN101956182A | 2011-01-26 | |||
| TWM611114U | 2021-05-01 | |||
| US20090142588A1 | 2009-06-04 |
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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