Title:
GAS INLET ASSEMBLY OF PROCESS CHAMBER, GAS INLET APPARATUS, AND SEMICONDUCTOR PROCESSING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2022/156495
Kind Code:
A1
Abstract:
A gas inlet assembly (1) of a process chamber (7) in semiconductor processing equipment, a gas inlet apparatus, and semiconductor processing equipment. The gas inlet assembly (1) is used for delivering a process gas into a gas inlet pipe (5) in communication with the process chamber (7), a plurality of gas mixing cavities (11a-11e) are provided in sequence in the gas inlet assembly (1) along the gas inlet direction, and any two adjacent gas mixing cavities (11a-11e) are in communication with each other; the gas inlet assembly (1) comprises a gas inlet connector (2), the gas inlet connector (2) is in communication with the gas mixing cavity (11a) located at the most upstream of the gas inlet direction, the gas mixing cavity (11e) located at the most downstream of the gas inlet direction is in communication with the gas inlet pipe (5); and the gas outlet direction of the gas inlet assembly (1) is the same as the gas inlet direction. The gas inlet assembly (1), gas inlet apparatus and semiconductor processing equipment can fully mix the process gas and make the process gas uniform, so that not only the distribution uniformity of the components of the process gas can be improved, but also the difference in gas flow velocities between different regions of the gas inlet pipe (5) can be reduced, thereby improving the process stability.
Inventors:
LI SHIKAI (CN)
Application Number:
PCT/CN2021/141995
Publication Date:
July 28, 2022
Filing Date:
December 28, 2021
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
C30B25/14; C23C16/40; C23C16/455; C30B29/36; H01J37/32; H01L21/02
Domestic Patent References:
| WO1989012703A1 | 1989-12-28 |
Foreign References:
| CN112941626A | 2021-06-11 | |||
| CN108728820A | 2018-11-02 | |||
| CN105331952A | 2016-02-17 | |||
| CN111403256A | 2020-07-10 | |||
| CN207282513U | 2018-04-27 | |||
| CN105529283A | 2016-04-27 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
Download PDF: