GAS LASER DEVICE AND MAGNETIC BEARING CONTROL METHOD

WIPO Patent Application WO/2018/193528

A1

This gas laser device is equipped with: a magnetic bearing containing an electromagnet, for which the magnetic force can be controlled, that supports the rotary shaft of a laser gas circulation fan so as to be rotatable in a magnetically levitated state due to the magnetic force; an electromagnet control unit controlling the magnetic force of the electromagnet on the basis of the displacement in the levitating position of the rotary shaft to adjust the levitating position; a motor generating the torque for causing the fan to rotate; a magnetic coupling for connecting the rotary shaft and the drive shaft of the motor by a magnetic attractive force to transmit the motor torque to the rotary shaft; an attractive force estimation sensor for detecting a parameter that allows the magnetic coupling attractive force to be estimated; an attractive force measurement unit for measuring the magnetic coupling attractive force on the basis of the parameter detected by the attractive force estimation sensor; and a correction unit for correcting the magnetic force of the electromagnet depending on the variation of the attractive force measured by the attractive force measurement unit.

MIKI MASAHARU (JP)
WAKABAYASHI OSAMU (JP)

PCT/JP2017/015630

October 25, 2018

April 18, 2017

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GIGAPHOTON INC (JP)

H01S3/036; F16C32/04

JP2000216460A	2000-08-04
JP2002204013A	2002-07-19
JP2005036973A	2005-02-10
JP2001027238A	2001-01-30
JP2014082243A	2014-05-08
JP2010209691A	2010-09-24
JP2010113192A	2010-05-20

HOSAKA, Nobuhisa (JP)

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