Title:
GAS LASER DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/166570
Kind Code:
A1
Abstract:
A laser device according to one aspect of the present disclosure includes: a power supply; a main capacitor; a solid-state switch; a step-up transformer; a first magnetic pulse compression circuit that has a first transfer capacitor and a first magnetic switch and that is connected to a secondary side of the step-up transformer; a second magnetic pulse compression circuit that has a second transfer capacitor and a second magnetic switch and that is connected downstream of the first magnetic pulse compression circuit; a peaking capacitor that is connected downstream of the second magnetic pulse compression circuit; a pair of discharge electrodes formed of a cathode electrode and an anode electrode; a regenerative transformer that transfers, to the main capacitor, electric charge generated by the pair of discharge electrodes after a main discharge; and a reset circuit that resets the first magnetic switch and the second magnetic switch. A potential (Ec) of the cathode electrode in a period from 0.5 μs to 20 μs after the main discharge starts is in a range from -200V to 200V.
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Inventors:
UEYAMA TAKESHI (JP)
UMEDA HIROSHI (JP)
UMEDA HIROSHI (JP)
Application Number:
PCT/JP2022/008669
Publication Date:
September 07, 2023
Filing Date:
March 01, 2022
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/097; H02M9/04
Foreign References:
| JP2007258558A | 2007-10-04 | |||
| JPH11112300A | 1999-04-23 | |||
| JP2000278963A | 2000-10-06 | |||
| JP2001094179A | 2001-04-06 | |||
| JP2010200446A | 2010-09-09 | |||
| US20040004987A1 | 2004-01-08 |
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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