Title:
GAS LASER OSCILLATOR AND METHOD FOR EXCHANGING GAS FOR GAS LASER OSCILLATOR
Document Type and Number:
WIPO Patent Application WO/2012/053298
Kind Code:
A1
Abstract:
A gas-enclosed-type gas laser oscillator (1) for oscillating laser with a gastight case being filled with laser gas includes: the gastight case (7); a laser gas supply source (12) for supplying the laser gas to the gastight case; and a vacuum pump (14) connected to the gastight case for performing vacuuming until the pressure within the gastight case reaches the target pressure at predetermined laser gas exchange intervals. The gas-enclosed-type gas laser oscillator (1) also has a means (10) for determining the target pressure on the basis of the laser gas exchange interval, a leak rate of impurity gas flowed from outside to the gastight case after vacuuming, and the allowable impurity gas pressure at which the gas laser oscillator can operate.
Inventors:
MIYAMOTO NAOKI (JP)
KUMAOKA MOTOTOSHI (JP)
KUMAOKA MOTOTOSHI (JP)
Application Number:
PCT/JP2011/070899
Publication Date:
April 26, 2012
Filing Date:
September 13, 2011
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
MIYAMOTO NAOKI (JP)
KUMAOKA MOTOTOSHI (JP)
MIYAMOTO NAOKI (JP)
KUMAOKA MOTOTOSHI (JP)
International Classes:
H01S3/036
Foreign References:
| JP2006303174A | 2006-11-02 | |||
| JPH118426A | 1999-01-12 | |||
| JPH02130981A | 1990-05-18 |
Attorney, Agent or Firm:
SAKAI, HIROAKI (JP)
Hiroaki Sakai (JP)
Hiroaki Sakai (JP)
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