Title:
GAS LASER OSCILLATOR
Document Type and Number:
WIPO Patent Application WO/2016/181511
Kind Code:
A1
Abstract:
A gas laser oscillator 10 is provided with the following: a gas sealing means 11; a discharge excitation means 12; a partial reflecting mirror 13; a full reflecting mirror 14; a laser gas circulation means 15; ducts 26, 27; and a control device 29. The laser gas circulation means 15 has a heat exchanger 21, three blowing fans 22a, 22b, 22c for circulating the laser gas, and a guide 25, and creates a laser gas flow while cooling the laser gas passing there through. The gas laser oscillator 10 creates a flow inside the ducts 26, 27 that is directed toward a discharge excitation region R1, thereby causing an inflow of the laser gas, which has been cooled by means of non-excitation regions R2, R3, R4, and R5, and the acceleration of this flow stabilizes the laser output.
Inventors:
KUROSAKI YOSHIHARU (JP)
EBIHARA SEI (JP)
EBIHARA SEI (JP)
Application Number:
PCT/JP2015/063678
Publication Date:
November 17, 2016
Filing Date:
May 12, 2015
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
H01S3/036; H01S3/03; H01S3/097
Foreign References:
JPH02192782A | 1990-07-30 | |||
JPS60254683A | 1985-12-16 | |||
JPS632393A | 1988-01-07 | |||
JPH07131090A | 1995-05-19 | |||
JPH06140692A | 1994-05-20 |
Attorney, Agent or Firm:
TAKAMURA, JUN (JP)
Jun Takamura (JP)
Jun Takamura (JP)
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