Title:
GAS MEASUREMENT APPARATUS, MULTIPLE-DEVICE SUBSTRATE, MANUFACTURING METHODS THEREFOR, AND METHODS FOR MANUFACTURING INFRARED LIGHT SOURCE AND PYROELECTRIC INFRARED SENSOR
Document Type and Number:
WIPO Patent Application WO/2016/024503
Kind Code:
A1
Abstract:
This invention provides the following: a gas measurement apparatus, a multiple-device substrate, an infrared light source, and a pyroelectric infrared sensor that can be manufactured via a simple process; and manufacturing methods therefor. The aforementioned gas measurement apparatus has an infrared light source, a sensor, and a gas cell and is characterized in that: the infrared light source has a first upper electrode, a first intermediate layer, and a first lower electrode; and the sensor has a second upper electrode made of the same material as the first upper electrode, a second intermediate layer made of the same material as the first intermediate layer, and a second lower electrode made of the same material as the first lower electrode.
Inventors:
YAMAMOTO KANSHO (JP)
ITO SHIGEO (JP)
KOMODA JUNYA (JP)
ITO SHIGEO (JP)
KOMODA JUNYA (JP)
Application Number:
PCT/JP2015/072189
Publication Date:
February 18, 2016
Filing Date:
August 05, 2015
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01N21/3504; G01J1/02; G01J1/04
Foreign References:
| JP2005208009A | 2005-08-04 | |||
| JPH0989773A | 1997-04-04 | |||
| JP2014053088A | 2014-03-20 |
Attorney, Agent or Firm:
Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)
Patent business corporation Fukami patent firm (JP)
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