Title:
GAS PHASE ETCHING APPARATUS AND GAS PHASE ETCHING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2018/064983
Kind Code:
A1
Abstract:
A gas phase etching apparatus and equipment. The gas phase etching apparatus comprises a reaction cavity body (201), the space defined thereby forming a reaction cavity (203); a base (209), which is arranged within the reaction cavity and used for supporting a workpiece being processed; an air intake element (202), which is connected to the reaction cavity body and used for introducing an etchant into the interior of the reaction cavity; a pressure control component, which is connected to the reaction cavity body and used for controlling the pressure in the reaction cavity; a first temperature controller (208), which is connected to the reaction cavity body and used for controlling the temperature in the reaction cavity to a first temperature; and a second temperature controller (207), which is connected to the base and used for controlling the temperature of the base to a second temperature. The gas phase etching apparatus and equipment are capable of respectively controlling the temperature of the reaction cavity and that of the base, obviate the need for cooling the workpiece being processed when silicon dioxide is removed before a temperature requirement of a subsequent work process is satisfied, obviate the need for integrating an annealing function in an etching cavity or providing an annealing cavity and a cooling cavity, and are simple in process design, inexpensive, and high in production capacity.
Inventors:
ZHANG JUN (CN)
MA ZHENGUO (CN)
WU XIN (CN)
WEN LIHUI (CN)
HU YUNLONG (CN)
ZHANG HENAN (CN)
CHU FUPING (CN)
MA ZHENGUO (CN)
WU XIN (CN)
WEN LIHUI (CN)
HU YUNLONG (CN)
ZHANG HENAN (CN)
CHU FUPING (CN)
Application Number:
PCT/CN2017/105368
Publication Date:
April 12, 2018
Filing Date:
October 09, 2017
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01L21/67
Foreign References:
| CN101500935A | 2009-08-05 | |||
| CN1088272A | 1994-06-22 | |||
| US20020058422A1 | 2002-05-16 | |||
| CN102376604A | 2012-03-14 | |||
| CN101392374A | 2009-03-25 | |||
| CN104995723A | 2015-10-21 | |||
| TW201616577A | 2016-05-01 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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