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Title:
GAS PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/131124
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a gas processing device capable of efficiently decomposing even components that are difficult to decompose using ozone (O3). This gas processing device is provided with: a tubular casing; an intake port for introducing into the casing a gas being processed including oxygen and moisture; an excimer lamp which is accommodated inside the casing, and which includes a tube body that is filled with a discharge gas and that extends in a first direction; an exhaust port for guiding out the gas being processed, having been irradiated with ultraviolet light emitted from the excimer lamp, to the outside of the casing; and a wind shielding member disposed in such a way as to surround the tube body or in such a way as to sandwich the tube body, when viewed from the first direction. The wind shielding member is disposed at least in a position between an end portion of the tube body closest to the intake port, among the end portions of the tube body in the first direction, and a central portion, in the first direction, of the tube body.

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Inventors:
NAITO,Keisuke (1-6-5 Marunouchi, Chiyoda-k, Tokyo 50, 〒1008150, JP)
Application Number:
JP2018/045647
Publication Date:
July 04, 2019
Filing Date:
December 12, 2018
Export Citation:
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Assignee:
USHIO DENKI KABUSHIKI KAISHA (1-6-5, Marunouchi Chiyoda-k, Tokyo 50, 〒1008150, JP)
International Classes:
A61L9/20; B01J19/12
Foreign References:
JP2012000216A2012-01-05
JPS6253657A1987-03-09
JPH0889564A1996-04-09
JP2017068944A2017-04-06
JPS5249595U1977-04-08
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (First Shin-Osaka MT Bldg. 2nd Floor, 5-13-9 Nishinakajima Yodogawa-ku, Osaka-sh, Osaka 11, 〒5320011, JP)
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