GAS PURGE DEVICE AND GAS PURGE METHOD

Title:

GAS PURGE DEVICE AND GAS PURGE METHOD

Document Type and Number:

WIPO Patent Application WO/2015/025584

Kind Code:

A1

Abstract:

　The present invention prevents a gas introduction part of an elastic body from being damaged upon contact with a nozzle, and furthermore prevents the gas introduction part and the nozzle from adhering to each other. A container is positioned, and a purge gas is introduced from the nozzle into the gas introduction part provided in a bottom part of the container, the bottom face being round and having a gas introduction hole at the center, the gas introduction part comprising an elastic body. The nozzle is provided with a tip surface being at least as large as the bottom face of the gas introduction part and having a planar shape, and a nozzle hole positioned at the center of the tip surface and being at least as small as the gas introduction hole of the container, the tip surface being roughened or being configured from a low-friction material, the tip surface and the gas introduction part being slidable.

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Inventors:

MURATA MASANAO (JP)
YAMAJI TAKASHI (JP)

Application Number:

PCT/JP2014/064596

Publication Date:

February 26, 2015

Filing Date:

June 02, 2014

Export Citation:

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Assignee:

MURATA MACHINERY LTD (JP)

International Classes:

G03F1/66; H01L21/673; H01L21/027

Domestic Patent References:

WO2012014940A1

2012-02-02

Foreign References:

JP2012248785A	2012-12-13
JP2012164948A	2012-08-30
JP2010520625A	2010-06-10
JP2012248785A	2012-12-13

Other References: