GAS PURIFIER HAVING REINFORCED VESSEL

WIPO Patent Application WO/2006/129481

A1

[PROBLEMS] A gas purifier for adsorptively removing gaseous fouling metal particles, etc. to produce a clean halogen or another gas has the following problem when it is constituted of a fluororesin. Since fluororesins are slightly permeable to halogen gases and ozone gas, halogen gases leak out through the wall of the vessel in the purifier to contaminate the working atmosphere in, e.g., a clean room, corrode nearby metals, and cause health hazard, etc. [MEANS FOR SOLVING PROBLEMS] A gas purifier is provided which comprises a barrel part made of a fluororesin, edge plates made of a fluororesin which have been united respectively to both ends of the barrel part, and a gas inlet member and a purified-gas outlet member which are made of a fluororesin and respectively have a feed gas inlet and a purified-gas outlet which extend through the two edge plates respectively, wherein a gas-purifying material is housed in the space surrounded by the barrel part and the two edge plates. The barrel part has a corrosion-resistant metallic sheath gastightly disposed therearound to prevent the purified gas from leaking out.

Nozaki, Fumio c/o Nihon Entegris K.K. (4-28 Mita 1-chome, Minato-k, Tokyo 73, 10800, JP)

PCT/JP2006/309803

December 07, 2006

May 17, 2006

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ENTEGRIS, INC. (3500 Lyman Boulevard, Chaska Minnesota, 55318, US)
Nozaki, Fumio c/o Nihon Entegris K.K. (4-28 Mita 1-chome, Minato-k, Tokyo 73, 10800, JP)

B01D53/04; C01B7/19

Kawaguchi, Yoshio (Kawaguti & Partners, Jochi Kioizaka Bldg. 7-1 Kioi-ch, Chiyoda-ku Tokyo, 102-0094, JP)

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