Title:
GAS REMOVAL SYSTEM
Document Type and Number:
WIPO Patent Application WO/2012/011271
Kind Code:
A1
Abstract:
Provided is a gas removal system which consumes less energy and can provide very clean air at a low dew point. An air passage region located at the end surface of a rotor (40) of a dry gas removal device (1) is divided into a regeneration zone (2a), a first purge zone (2b), a gas reduction zone (2c), and a second purge zone (2d) in order of the direction of rotation of the rotor. A closed system circulation path (3) is provided between the first purge zone and the second purge zone. A purge air cooling device (4) and a purge air circulating fan (5) are installed in the circulation path. Air which has passed through the first purge zone passes through the second purge zone, then is cooled by the cooling device, and passes again through the first purge zone. By using this dry gas removal device, the rotor is heated before entering the regeneration zone from the gas reduction zone, and cooled before moving from the regeneration zone to the gas reduction zone, and consequently the high-accuracy gas removal system can be provided.
Inventors:
EBINE, Takeshi (C/O TECHNO RYOWA LTD, 2-26-20 Minamiootsuka, Toshima-k, Tokyo 05, 〒1700005, JP)
Application Number:
JP2011/004086
Publication Date:
January 26, 2012
Filing Date:
July 19, 2011
Export Citation:
Assignee:
TECHNO RYOWA LTD. (8-5-41, Akasaka Minato-k, Tokyo 52, 〒1070052, JP)
株式会社テクノ菱和 (〒52 東京都港区赤坂八丁目５番４１号 Tokyo, 〒1070052, JP)
株式会社テクノ菱和 (〒52 東京都港区赤坂八丁目５番４１号 Tokyo, 〒1070052, JP)
International Classes:
B01D53/06; B01D53/26
Attorney, Agent or Firm:
KIUCHI, Mitsuharu (5th Floor, Toranomon-Yoshiara Bldg. 1-6-13, Nishi-Shinbashi, Minato-k, Tokyo 03, 〒1050003, JP)
Claims: