Title:
GAS SENSOR, CONTAINED COMPONENT SENSING DEVICE PROVIDED WITH GAS SENSOR, INSPECTION SYSTEM PROVIDED WITH GAS SENSOR, GAS SENSOR INSPECTION METHOD, AND METHOD FOR MANUFACTURING GAS SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/184721
Kind Code:
A1
Abstract:
A gas sensor provided with: an electroconductive membrane (22) flexed by an applied surface stress; a fixing member (24) disposed further to the outside than the membrane (22); a linking part (26) for linking the membrane (22) and the fixing member (24); a flexible resistance (28), the resistance value of which varies in accordance with bending occurring in the linking part (26); an electroconductive support substrate (10) connected to the fixing member (24) and disposed so as to be provided in a gap (40) between the membrane (22) and the linking part (26); a receiving body (30) formed on a region including the center of a surface which is a surface on the reverse side from the surface of the membrane (22) facing the support substrate (10), the receiving body (30) producing a deformation corresponding to an adsorbed substance; a first terminal (50a) capable of applying a first potential to the membrane (22); a second terminal (50b) capable of applying a second potential to the support substrate (10); and an insulation part (6) for electrically insulating the fixing member (24) and the support substrate (10).
Inventors:
HIRASHIMA DAIKI (JP)
MOCHIZUKI HIDENORI (JP)
MURAKAMI TAKANORI (JP)
MOCHIZUKI HIDENORI (JP)
MURAKAMI TAKANORI (JP)
Application Number:
PCT/JP2020/011265
Publication Date:
September 17, 2020
Filing Date:
March 13, 2020
Export Citation:
Assignee:
ASAHI CHEMICAL IND (JP)
International Classes:
G01L1/18; G01L25/00; G01N5/02; G01N13/00; G01N19/00; H01L29/84
Foreign References:
| US7556775B2 | 2009-07-07 |
Attorney, Agent or Firm:
TANAKA Hidetetsu et al. (JP)
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