Title:
GAS SENSOR DEVICE AND METHOD FOR REMOVING GAS COMPONENTS
Document Type and Number:
WIPO Patent Application WO/2018/079509
Kind Code:
A1
Abstract:
The present invention provides: a gas sensor device which is capable of removing components attached to the gas sensor by a relatively simple method and easily restoring the signal baseline of the gas sensor to a certain state; and a method for removing gas components. A gas sensor device according to an embodiment of the present invention is provided with a gas sensor and a cleaning means containing a liquid for cleaning the gas sensor, wherein the gas sensor is provided with: a sensor body capable of detecting characteristic parameters of components present in a gas phase or a liquid phase; and a sensitive film which is coated on the surface of the sensor body and is resistant to liquids.
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Inventors:
YOSHIKAWA GENKI (JP)
SHIBA KOTA (JP)
IMAMURA GAKU (JP)
YASUDA TAKANORI (JP)
KOBAYASHI KYOHEI (JP)
SAKAI HISASHI (JP)
SHIBA KOTA (JP)
IMAMURA GAKU (JP)
YASUDA TAKANORI (JP)
KOBAYASHI KYOHEI (JP)
SAKAI HISASHI (JP)
Application Number:
PCT/JP2017/038256
Publication Date:
May 03, 2018
Filing Date:
October 24, 2017
Export Citation:
Assignee:
NAT INST MATERIALS SCIENCE (JP)
KYOCERA CORP (JP)
KYOCERA CORP (JP)
International Classes:
G01N19/00; G01N27/00; G01N27/22; G01N5/02
Domestic Patent References:
| WO2016121155A1 | 2016-08-04 | |||
| WO2011148774A1 | 2011-12-01 |
Foreign References:
| JP2014157099A | 2014-08-28 | |||
| JP2016118438A | 2016-06-30 | |||
| JP2006337249A | 2006-12-14 | |||
| JP2010101852A | 2010-05-06 | |||
| JP2014115084A | 2014-06-26 | |||
| JP2014219223A | 2014-11-20 |
Other References:
SHIBA, K., SUGIYAMA,I., TAKEI, T. YOSHIKAWA, G.: "Controlled growth of silica-titania hybrid functional nanoparticles though a multi step microfluid approach", CHEMICAL COMMUNICATIONS, vol. 51, no. 87, 1 January 2015 (2015-01-01), pages 15854 - 15857, XP055598732, ISSN: 1359-7345, DOI: 10.1039/C5CC07230A
D. LEE; S. KIM; I. CHAE; S. JEON; T. THUNDAT: "Nanowell-patterned Ti02 microcantilevers for calorimetric chemical sensing", APPLIED PHYSICS LETTERS, vol. 104, 2014, pages 141903, XP012183987
G. YOSHIKAWA; T. AKIYAMA; S. GAUTSCH; P. VETTIGER; H. ROHRER: "Nanomechanical Membrane-type Surface Stress Sensor", NANO LETTERS, vol. 11, 2011, pages 1044 - 1048, XP055506585
SHIBA.K ET AL: "Controlled growth of silica-titania hybrid functional nanoparticles through a multistep microfluidic approach", CHEMICAL COMMUNICATIONS, vol. 51, no. 87, 1 January 2015 (2015-01-01), pages 15854 - 15857, XP055598732, ISSN: 1359-7345
See also references of EP 3534146A4
D. LEE; S. KIM; I. CHAE; S. JEON; T. THUNDAT: "Nanowell-patterned Ti02 microcantilevers for calorimetric chemical sensing", APPLIED PHYSICS LETTERS, vol. 104, 2014, pages 141903, XP012183987
G. YOSHIKAWA; T. AKIYAMA; S. GAUTSCH; P. VETTIGER; H. ROHRER: "Nanomechanical Membrane-type Surface Stress Sensor", NANO LETTERS, vol. 11, 2011, pages 1044 - 1048, XP055506585
SHIBA.K ET AL: "Controlled growth of silica-titania hybrid functional nanoparticles through a multistep microfluidic approach", CHEMICAL COMMUNICATIONS, vol. 51, no. 87, 1 January 2015 (2015-01-01), pages 15854 - 15857, XP055598732, ISSN: 1359-7345
See also references of EP 3534146A4
Attorney, Agent or Firm:
TSUZUKI Noriaki (JP)
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