Title:
GAS SENSOR ELECTRODE MANUFACTURING METHOD AND GAS SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/004769
Kind Code:
A1
Abstract:
A gas sensor electrode manufacturing method, according to one embodiment of the present invention, may comprise the steps of: providing a porous polymer membrane in a chamber; plasma-pre-processing the surface of the porous polymer membrane using plasma formed when inputting a processing gas in the chamber; and forming a metal thin film on the plasma-pre-processed porous polymer membrane by physical vapor deposition.
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Inventors:
CHO JEONG HO (KR)
JEONG YOUNG HUN (KR)
YUN JI SUN (KR)
JEON CHANG JUN (KR)
CHOI YONG HO (KR)
JEONG YOUNG HUN (KR)
YUN JI SUN (KR)
JEON CHANG JUN (KR)
CHOI YONG HO (KR)
Application Number:
PCT/KR2019/001991
Publication Date:
January 02, 2020
Filing Date:
February 19, 2019
Export Citation:
Assignee:
KOREA INST CERAMIC ENG & TECH (KR)
International Classes:
G01N27/30; G01N27/407; G01N33/00
Foreign References:
| KR100851067B1 | 2008-08-12 | |||
| KR20080050951A | 2008-06-10 | |||
| KR20160016088A | 2016-02-15 | |||
| KR20070016640A | 2007-02-08 | |||
| KR20060080786A | 2006-07-11 |
Attorney, Agent or Firm:
AHN, Joon-Hyung et al. (KR)
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