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Title:
GAS SUPPLY INTEGRATED UNIT AND METHOD OF ADDING GAS UNIT
Document Type and Number:
WIPO Patent Application WO/2005/114016
Kind Code:
A1
Abstract:
A gas supply integrated unit and a method of adding a gas unit, where a gas unit is easy to handle in expanding a line. A process gas common flow-path end-section manual valve (28) and a purge gas common flow-path end-section manual valve (29) are provided on a gas supply integrated unit where gas units (1, 2, A-E) are installed on rails (31, 32). T-nuts (45, 46, 47) in which two bolt holes (471, 471) are formed are slidably installed on guide grooves (31a, 31b, 32a, 32b) formed in the rails (31, 32). On a sixth gas unit (F) to be added, there are arranged a process gas common flow-path end-section manual valve (41) communicating with the process gas common flow-path end-section manual valve (28) and a purge gas common flow-path end-section manual valve (42) communicating with the purge gas common flow-path end-section manual valve (29). Bolts (V) penetrating the sixth gas unit (F) are fastened to the bolt holes (471) to attach the sixth gas unit (F) to the rails (31, 32) through T-nuts (47F).

Inventors:
Takeichi, Akihiro c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Aoyama, Tatsuhito c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Miwa, Toshikazu c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Nagaya, Akinori c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Application Number:
PCT/JP2005/008694
Publication Date:
December 01, 2005
Filing Date:
May 12, 2005
Export Citation:
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Assignee:
CKD CORPORATION (250 Ouji 2-chome, Komaki-shi, Aichi 51, 48585, JP)
Takeichi, Akihiro c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Aoyama, Tatsuhito c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Miwa, Toshikazu c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
Nagaya, Akinori c/o CKD CORPORATION (250 Ouji 2-chom, Komaki-shi Aichi 51, 48585, JP)
International Classes:
F16K27/00; F17D1/04; (IPC1-7): F16K27/00; F17D1/04
Foreign References:
JP3482601B2
JP2003091322A
JPH10214117A
JP2000035148A
JP2002267100A
JP2001517767A
Attorney, Agent or Firm:
Cosmos, Patent Office (Annex 2nd Floor, Nagoya Center Building 2-22, Nishiki 2-chome, Naka-k, Nagoya-shi Aichi 03, 46000, JP)
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