Title:
GAS TREATMENT METHOD, STORAGE CHAMBER, INCUBATOR, AND STERILIZER
Document Type and Number:
WIPO Patent Application WO/2021/131888
Kind Code:
A1
Abstract:
Provided is a gas treatment method in which, when a gas that contains a to-be-treated substance belonging to VOCs is present inside a blockage space, it is possible to treat the VOCs with high degradation efficiency. A method having a step (a) in which a gas inside a blockage space is taken into a gas treatment device that includes an excimer lamp, a step (b) in which the gas is irradiated with vacuum ultraviolet light from the excimer lamp while inside the gas treatment device to generate radicals and degrade a to-be-treated substance, and a step (c) in which the gas obtained after the treatment executed in step (b) is discharged into the blockage space via an ozone degradation filter.
Inventors:
NAITO KEISUKE (JP)
Application Number:
PCT/JP2020/046696
Publication Date:
July 01, 2021
Filing Date:
December 15, 2020
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
A61L2/20; A61L9/00; A61L9/20
Domestic Patent References:
| WO2019131124A1 | 2019-07-04 |
Foreign References:
| JPH06238123A | 1994-08-30 | |||
| JP2006333954A | 2006-12-14 | |||
| JP2000166536A | 2000-06-20 | |||
| JPH0373152A | 1991-03-28 | |||
| JP2006333954A | 2006-12-14 |
Other References:
See also references of EP 4082584A4
Attorney, Agent or Firm:
UNIUS PATENT ATTORNEYS OFFICE (JP)
Download PDF: