Title:
GASEOUS CORROSION CAVITY CAPABLE OF ADJUSTING INTERNAL AND EXTERNAL PRESSURE DIFFERENCE AND GASEOUS CORROSION METHOD BY USING GASEOUS CORROSION CAVITY
Document Type and Number:
WIPO Patent Application WO/2019/015452
Kind Code:
A1
Abstract:
Disclosed in the present invention is a gaseous corrosion cavity capable of adjusting an internal and external pressure difference, comprising an upper cavity, a lower cavity, and a lifting and lowering control device. The lifting and lowering control device is connected to the upper cavity, and controls the vertical movement of the upper cavity. The lower cavity is fixed, and is provided with a cavity air inlet and a cavity air outlet. The gaseous corrosion cavity also comprises a cavity draft control device, the cavity draft control device being connected to the cavity air outlet of the lower cavity, and adjusting the internal and external pressure difference of the gaseous corrosion cavity. According to the gaseous corrosion cavity capable of adjusting an internal and external pressure difference disclosed in the present invention, the balance of the internal and external pressures of the cavity can be maintained, and the cavity made of a nonmetal material can be protected from being damaged. Also disclosed in the present invention is a method for performing gaseous corrosion on a wafer by using a gaseous corrosion cavity capable of adjusting an internal and external pressure difference.
Inventors:
XU KAIDONG (CN)
Application Number:
PCT/CN2018/093268
Publication Date:
January 24, 2019
Filing Date:
June 28, 2018
Export Citation:
Assignee:
JIANGSU LEUVEN INSTRUMMENTS CO LTD (CN)
International Classes:
H01J37/32; H01L21/67
Foreign References:
| CN103165407A | 2013-06-19 | |||
| CN1420526A | 2003-05-28 | |||
| CN86105419A | 1987-04-29 | |||
| CN107610998A | 2018-01-19 | |||
| CN106876304A | 2017-06-20 |
Attorney, Agent or Firm:
BEIJING TRUSTED INTELLECTUAL PROPERTY AGENCY LTD et al. (CN)
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