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Patent Searching and Data


Title:
GASEOUS CORROSION CAVITY HAVING WAFER POSITION DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/015451
Kind Code:
A1
Abstract:
A gaseous corrosion cavity having a wafer position detection device, comprising an upper cavity, a lower cavity, a lifting and lowering control device, a wafer carrying platform, a wafer ejector pin, and a mechanical hand loaded with a sensor. The lifting and lowering control device is connected to the upper cavity, and controls the vertical movement of the upper cavity. The wafer carrying platform and the wafer ejector pin are disposed in the lower cavity, wherein the exterior of the lower cavity is provided with a wafer position detection unit. The wafer position detection unit comprises a first photoelectric emission module, a first photoelectric receiving module, a second photoelectric emission module, a second photoelectric receiving module, a control module, a drive module, and an alarm module.

Inventors:
XU KAIDONG (CN)
Application Number:
PCT/CN2018/093267
Publication Date:
January 24, 2019
Filing Date:
June 28, 2018
Export Citation:
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Assignee:
JIANGSU LEUVEN INSTRUMMENTS CO LTD (CN)
International Classes:
H01J37/32; H01L21/67
Foreign References:
CN107610997A2018-01-19
US20140036274A12014-02-06
CN103515264A2014-01-15
Attorney, Agent or Firm:
BEIJING TRUSTED INTELLECTUAL PROPERTY AGENCY LTD (CN)
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