Title:
GATE VALVE AND METHOD OF OPENING/CLOSING THE GATE VALVE
Document Type and Number:
WIPO Patent Application WO/2010/101014
Kind Code:
A1
Abstract:
A gate valve (GV) is installed in a load lock chamber (LL) to or from which a substrate is transferred. The gate valve (GV) comprises a casing (105) having a front opening (105a) in communication with an inner chamber of the load lock (LL), a rotary member (110) rotatably received in a casing (104) the rotary member having a rotary shaft (110a) and a valve (110b) fixed to the rotary shaft, and an expandable seal member (200) fixed to the valve (110b). To close the gate valve, the rotary shaft (110a) is rotated first to rotate the valve (110b) into a first position where the front opening (105a) is closed and then the expandable seal (200) member is expanded.
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Inventors:
MIYAGI KATSUSHIN (JP)
Application Number:
PCT/JP2010/052067
Publication Date:
September 10, 2010
Filing Date:
February 12, 2010
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
MIYAGI KATSUSHIN (JP)
MIYAGI KATSUSHIN (JP)
International Classes:
F16K5/04; B65G49/00; F16K39/06; F16K51/02
Foreign References:
| JPH0592580U | 1993-12-17 | |||
| JP2005308097A | 2005-11-04 | |||
| US4607820A | 1986-08-26 | |||
| US3475004A | 1969-10-28 | |||
| JPH05215249A | 1993-08-24 |
Attorney, Agent or Firm:
KAMEYA, Yoshiaki et al. (JP)
Yoshiaki Kameya (JP)
Yoshiaki Kameya (JP)
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