GATE VALVE UNIT, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD THEREOF

Title:

GATE VALVE UNIT, SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2012/128029

Kind Code:

A1

Abstract:

A substrate processing device is provided with: a hot wall chamber the pressure in which can be reduced and which comprises a side wall the temperature of which becomes higher than the normal temperature, and a first substrate carry-in/out port provided in the side wall; a transfer chamber the pressure in which can be reduced and which comprises a transfer arm mechanism for carrying the substrate into and out of the hot wall chamber, and a second substrate carry-in/out port; and a gate valve unit which is provided between the hot wall chamber and the transfer chamber. The gate valve unit is provided with: a housing which comprises side walls in which a communication hole, a first housing substrate carry-in/out port, and a second housing substrate carry-in/out port are provided; a valve element which is ascendible and descendible within the housing; and a double seal structure which comprises a first seal member and a second seal member provided outside the first seal member, and the communication hole causes a gap between the first seal member and the second seal member to communicate with the space within the housing.

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Inventors:

YAMAMOTO KAORU (JP)
HARA MASAMICHI (JP)
MIYASHITA TETSUYA (JP)

Application Number:

PCT/JP2012/055711

Publication Date:

September 27, 2012

Filing Date:

March 06, 2012

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
YAMAMOTO KAORU (JP)
HARA MASAMICHI (JP)
MIYASHITA TETSUYA (JP)

International Classes:

C23C16/44; F16J15/10; F16J15/52; F16K3/18; F16K27/00; F16K49/00; F16K51/02; H01L21/285

Foreign References:

JP2006124792A	2006-05-18
JP2004319871A	2004-11-11
JPH06247460A	1994-09-06
JPS6037139A	1985-02-26
JPH0979388A	1997-03-25
JP2009115242A	2009-05-28
JP2004225878A	2004-08-12
JPH11315940A	1999-11-16
JP2001330172A	2001-11-30
JPH05272662A	1993-10-19
JPH05196150A	1993-08-06
JPH0813149A	1996-01-16
JPH07198063A	1995-08-01
JPH09263944A	1997-10-07

Attorney, Agent or Firm:

ITOH, TADAHIKO (JP)
Tadahiko Ito (JP)

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Claims:

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