Title:
GATE VALVE
Document Type and Number:
WIPO Patent Application WO/2011/105737
Kind Code:
A3
Abstract:
The present invention relates to a gate valve mounted to an exhaust line of vacuum equipment. The valve forms a portion of the exhaust line. The gate valve is moved horizontally so that it is possible to completely block processing contaminants and by-products from being introduced into the gate valve. Furthermore, the exhaust effect of the gate valve is excellent.
Inventors:
JOH GIL YOUNG (KR)
CHOI HAN GI (KR)
CHOI HAN GI (KR)
Application Number:
PCT/KR2011/001167
Publication Date:
January 05, 2012
Filing Date:
February 23, 2011
Export Citation:
Assignee:
LAONTECH CO LTD (KR)
JOH GIL YOUNG (KR)
CHOI HAN GI (KR)
JOH GIL YOUNG (KR)
CHOI HAN GI (KR)
International Classes:
F16K51/02; F16K27/04; F16K49/00; H01L21/02
Foreign References:
| KR100779241B1 | 2007-11-23 | |||
| JPH0320188A | 1991-01-29 | |||
| KR200292558Y1 | 2002-10-25 |
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Claims: