Title:
GENERATING DEVICE FOR GENERATING PLASMA IN TUBE-SHAPED BODY
Document Type and Number:
WIPO Patent Application WO/2015/119199
Kind Code:
A1
Abstract:
The present invention provides a plasma-generating device able to perform DLC deposition by a batch process on an inner surface of tube-shaped bodies having various diameters and aspect ratios, and able to perform DLC deposition on the inner surface of a long circular tube without being affected by the length of the tube-shaped body having a circular tube shape or the like. The generating device for generating plasma in a tube-shaped body is characterized in being provided with: a tube-shaped body; a metal electrode inserted in an inner space portion of the tube-shaped body; a raw material insertion hole for inserting raw material into the inner space portion of the tube-shaped body; and a nanopulse power source for applying a pulse voltage, the tube-shaped body forming a cathode, and the metal electrode forming the anode.
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Inventors:
OHTAKE NAOTO (JP)
INOUE MASAKI (JP)
INOUE MASAKI (JP)
Application Number:
PCT/JP2015/053252
Publication Date:
August 13, 2015
Filing Date:
February 05, 2015
Export Citation:
Assignee:
TOKYO INST TECH (JP)
International Classes:
C23C16/27; H05H1/24
Foreign References:
| JP2003013225A | 2003-01-15 | |||
| JP2004270022A | 2004-09-30 |
Other References:
MASAKI INOUE ET AL.: "Synthesis of DLC films on metal substrate by Plasma CVD at Subatmospheric Pressure", THE JAPAN SOCIETY OF MECHANICAL ENGINEERS DAI 21 KAI KIKAI ZAIRYO ZAIRYO KAKO GIJUTSU KOENKAI CD-ROM RONBUNSHU, 7 November 2013 (2013-11-07)
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
Aoki 篤 (JP)
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