Title:
GERM-FREE LIQUEFIED GAS PRODUCTION APPARATUS
Document Type and Number:
WIPO Patent Application WO/2017/221575
Kind Code:
A1
Abstract:
A germ-free liquefied gas production apparatus according to the present invention is provided with: a liquefied gas storing tank; a material gas supply device that supplies material gas into the liquefied gas storing tank; a cooling device that cools the inside of the liquefied gas storing tank so as to liquefy the material gas; supply piping that connects the material gas supply device and the liquefied gas storing tank to each other; a sterilization filter that is provided to the supply piping; a sterilization device that performs, by a high temperature saturated water vapor, heat sterilization on a sterilization region positioned at a downstream portion relative to the sterilization filter; and a drying device that removes moisture resulting from the heat sterilization, so as to dry the sterilization region.
Inventors:
YOSHIMOTO TSUYOSHI (JP)
OHINATA YOICHI (JP)
KINOSHITA TAKAO (JP)
FURUYA SHINJI (JP)
SUZUKI NAOTO (JP)
HIRUMA MASAYOSHI (JP)
TAKASAKI SHINJI (JP)
OHINATA YOICHI (JP)
KINOSHITA TAKAO (JP)
FURUYA SHINJI (JP)
SUZUKI NAOTO (JP)
HIRUMA MASAYOSHI (JP)
TAKASAKI SHINJI (JP)
Application Number:
PCT/JP2017/017835
Publication Date:
December 28, 2017
Filing Date:
May 11, 2017
Export Citation:
Assignee:
ULVAC INC (JP)
ULVAC CRYOGENICS INCORPORATED (JP)
ULVAC CRYOGENICS INCORPORATED (JP)
International Classes:
A61L2/07; F17C5/02
Foreign References:
US4620962A | 1986-11-04 | |||
JP2000185710A | 2000-07-04 | |||
JP2007126177A | 2007-05-24 | |||
JPS62102929U | 1987-06-30 | |||
JP2003275745A | 2003-09-30 | |||
JP2000185710A | 2000-07-04 | |||
JP4766226B2 | 2011-09-07 | |||
JP2013531212A | 2013-08-01 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
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