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Patent Searching and Data


Title:
GETTER PUMP MODULE AND SYSTEM GETTER PUMP MODULE AND SYSTEM
Document Type and Number:
WIPO Patent Application WO1996017171
Kind Code:
A3
Inventors:
KRUEGER GORDON P
LORIMER D ARCY H
CARELLA SERGIO
CONTE ANDREA
Application Number:
US9515598W
Publication Date:
October 24, 1996
Filing Date:
November 30, 1995
Export Citation:
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Assignee:
SAES PURE GAS INC (US)
International Classes:
C23C14/54; C23C14/56; F04B37/02; F04B37/08; F04B37/14; F04B37/16; H01J9/38; H01L21/00; H01L21/02; H01L21/20; (IPC1-7): F04B37/02
Domestic Patent References:
WO1996013620A11996-05-09
WO1994002957A11994-02-03
Foreign References:
EP0144522A21985-06-19
DE1011996B1957-07-11
US4515528A1985-05-07
US5320496A1994-06-14
US4312669A1982-01-26
GB2077487A1981-12-16
US3780501A1973-12-25
DE4110588A11992-10-08
US3662522A1972-05-16
EP0693626A11996-01-24
FR2370357A11978-06-02
US4460673A1984-07-17
US3892650A1975-07-01
US5340460A1994-08-23
Other References:
PATENT ABSTRACTS OF JAPAN vol. 017, no. 449 (M - 1465) 18 August 1993 (1993-08-18)
PATENT ABSTRACTS OF JAPAN vol. 007, no. 223 (M - 247) 4 October 1983 (1983-10-04)
PATENT ABSTRACTS OF JAPAN vol. 95, no. 009
PATENT ABSTRACTS OF JAPAN vol. 015, no. 447 (M - 1179) 14 November 1991 (1991-11-14)
PATENT ABSTRACTS OF JAPAN vol. 012, no. 137 (M - 690) 26 April 1988 (1988-04-26)
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