Title:
GLASS SUBSTRATE HOLDING FILM BODY, AND GLASS SUBSTRATE POLISHING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/122454
Kind Code:
A1
Abstract:
Disclosed is a glass substrate holding film body such that、in terms of configuration, a self-adsorption type sheet (32) is bonded to a back plate with a double-faced adhesive sheet (34) therebetween, and that a glass substrate is held by being adsorbed on the self-adsorption type sheet. The double-faced adhesive sheet is composed of a piece of sheet-like base material (38) and adhesive layers (40, 42) provided on both surfaces of the base material. The adhesive layers are provided in such a way that predetermined gaps (B" ", B" ") are formed, respectively, in the same plane of the base material. The gaps provided on both surfaces of the base material do not overlap each other in the lamination direction of the adhesive layers.
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Inventors:
FURUTA MITSURU (JP)
YOKOTA MINORU (JP)
SASAMORI TAKASHI (JP)
YOKOTA MINORU (JP)
SASAMORI TAKASHI (JP)
Application Number:
PCT/JP2011/057256
Publication Date:
October 06, 2011
Filing Date:
March 24, 2011
Export Citation:
Assignee:
ASAHI GLASS CO LTD (JP)
FUJIBO HOLDINGS INC (JP)
FURUTA MITSURU (JP)
YOKOTA MINORU (JP)
SASAMORI TAKASHI (JP)
FUJIBO HOLDINGS INC (JP)
FURUTA MITSURU (JP)
YOKOTA MINORU (JP)
SASAMORI TAKASHI (JP)
International Classes:
B24B7/24; B24B37/27
Foreign References:
JP2009119533A | 2009-06-04 | |||
JPH02220838A | 1990-09-04 | |||
US20080200105A1 | 2008-08-21 |
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
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Claims:
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