Title:
GLASS SUBSTRATE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/096366
Kind Code:
A1
Abstract:
Provided is a glass substrate polishing method such that even if a plurality of batches are polished, reduction in the polishing processing rate can be restricted. Also provided is a glass substrate manufacturing method such that glass substrates having high mechanical strength are manufactured to high precision shapes at low cost, said high mechanical strength being required of glass substrates for next generation hard disks. The glass substrate manufacturing method has a process wherein a glass plate that is an article to be processed is held between an upper surface plate and a lower surface plate via polishing pads, and wherein the polishing pads and the glass plate are relatively moved, resulting in the glass plate being polished. This method comprises an ordinary polishing process wherein polishing is performed while polishing liquid containing abrasive grains stored in a tank is supplied in circulation, and a rinsing process wherein circulation-supply of polishing liquid containing abrasive grains is stopped, and wherein the polishing pads and the glass plate are relatively moved while rinsing liquid containing no abrasive grains is supplied. At least part of the rinsing liquid used in the rinsing process is supplied to the tank for the polishing liquid containing abrasive grains.
Inventors:
YAMASHITA, Yutaka (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
山下 豊 (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 株式会社オハラ内 Kanagawa, 〒2525286, JP)
GOTO, Naoyuki (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
後藤 直雪 (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 株式会社オハラ内 Kanagawa, 〒2525286, JP)
山下 豊 (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 株式会社オハラ内 Kanagawa, 〒2525286, JP)
GOTO, Naoyuki (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
後藤 直雪 (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 株式会社オハラ内 Kanagawa, 〒2525286, JP)
Application Number:
JP2011/051942
Publication Date:
August 11, 2011
Filing Date:
January 31, 2011
Export Citation:
Assignee:
OHARA INC. (15-30, Oyama 1-chome Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
株式会社オハラ (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 Kanagawa, 〒2525286, JP)
YAMASHITA, Yutaka (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
山下 豊 (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 株式会社オハラ内 Kanagawa, 〒2525286, JP)
GOTO, Naoyuki (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
株式会社オハラ (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 Kanagawa, 〒2525286, JP)
YAMASHITA, Yutaka (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
山下 豊 (〒86 神奈川県相模原市中央区小山１丁目１５番３０号 株式会社オハラ内 Kanagawa, 〒2525286, JP)
GOTO, Naoyuki (15-30 Oyama 1-chome, Chuo-ku, Sagamihara-sh, Kanagawa 86, 〒2525286, JP)
International Classes:
B24B37/00; B24B7/24; B24B53/12; C03C19/00; G11B5/73; G11B5/84
Attorney, Agent or Firm:
SHOBAYASHI, Masayuki et al. (Takase Bldg, 25-8 Higashi-ikebukuro 1-chome, Toshima-k, Tokyo 13, 〒1700013, JP)
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Claims: