Title:
GLASS WAFER SUCTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/138974
Kind Code:
A1
Abstract:
A glass wafer suction device, comprising a suction head (1). The suction head (1) is provided with a suction cavity and a suction port in direct contact with a glass wafer (5); the suction head (1) is further provided with a blocky structure (2); an air passage (3) communicated with the suction cavity is formed in the blocky structure (2); a plurality of supporting columns (4) for supporting the wafer are densely distributed in the suction cavity. According to the suction device, the glass wafer (5) can be suctioned out from a mold even in the case that the glass wafer (5) is not completely cooled, so that many adverse effects in a molding process of the glass wafer (5) are avoided, the production time is shortened, and the production efficiency is improved; in addition, the device can be used as a transfer tool of the glass wafer (5) to convey the unmolded glass wafer (5) to the mold for molding.
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Inventors:
KJAER JACOB KIBSGAARD (DK)
NIELSEN PETER KROHNE (DK)
JENSEN SIMON BO (DK)
SOBOL MICHAL (DK)
TANG TSZ LOK KEITH (DK)
AABO THOMAS (DK)
NIELSEN PETER KROHNE (DK)
JENSEN SIMON BO (DK)
SOBOL MICHAL (DK)
TANG TSZ LOK KEITH (DK)
AABO THOMAS (DK)
Application Number:
PCT/CN2020/076167
Publication Date:
July 15, 2021
Filing Date:
February 21, 2020
Export Citation:
Assignee:
AAC OPTICS CHANGZHOU CO LTD (CN)
International Classes:
H01L21/683; H01L21/56
Foreign References:
| CN104637854A | 2015-05-20 | |||
| JPH04323849A | 1992-11-13 | |||
| CN108109951A | 2018-06-01 | |||
| CN2864981Y | 2007-01-31 | |||
| EP0456426A1 | 1991-11-13 | |||
| JPS58153344A | 1983-09-12 |
Attorney, Agent or Firm:
GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)
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