Title:
GRAIN SIZE TUNING FOR RADIATION RESISTANCE
Document Type and Number:
WIPO Patent Application WO/2015/147933
Kind Code:
A3
Abstract:
A process for producing a radiation resistant nanocrystalline material having a polycrystalline microstructure from a starting material selected from metals and metal alloys. The process including depositing the starting material by physical vapor deposition onto a substrate that is maintained at a substrate temperature from about room temperature to about 850 °C to produce the nanocrystalline material. The process may also include heating the nanocrystalline material to a temperature of from about 450 °C to about 800 °C at a rate of temperature increase of from about 2 °C/minute to about 30 °C/minute; and maintaining the nanocrystalline material at the temperature of from about 450 °C to about 800 °C for a period from about 5 minutes to about 35 minutes. The nanocrystalline materials produced by the above process are also described. The nanocrystalline materials produced by the process are resistant to radiation damage.
Inventors:
TAHERI MITRA LENORE (US)
VETTERICK GREG (US)
VETTERICK GREG (US)
Application Number:
PCT/US2014/071932
Publication Date:
December 10, 2015
Filing Date:
December 22, 2014
Export Citation:
Assignee:
UNIV DREXEL (US)
TAHERI MITRA LENORE (US)
VETTERICK GREG (US)
TAHERI MITRA LENORE (US)
VETTERICK GREG (US)
International Classes:
H01L21/203
Foreign References:
| US20080135914A1 | 2008-06-12 | |||
| US20130122317A1 | 2013-05-16 | |||
| US20130059121A1 | 2013-03-07 | |||
| US20080035021A1 | 2008-02-14 | |||
| US20060017081A1 | 2006-01-26 |
Attorney, Agent or Firm:
DUNLEAVY, Kevin, J. (Drucker & Dunleavy, P.c.,1500 John F. Kennedy Blvd.,Suite 31, Philadelphia Pennsylvania, US)
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