GRAPHENE NANOCRYSTALLINE CARBON FILM, PREPARATION METHOD THEREFOR AND USE THEREOF

WIPO Patent Application WO/2020/015057

A1

Disclosed are a graphene nanocrystalline carbon film, a preparation method therefor and the use thereof. The graphene nanocrystalline carbon film comprises a conductive substrate, and several graphene sheets are grown on the conductive substrate in a standing manner so as to form a three-dimensional graphene nanocrystalline carbon film. The preparation method therefor comprises: cleaning the conductive substrate, then using an ECR process to grow the graphene sheets on the conductive substrate in a standing manner. The graphene nanocrystalline carbon film has an anisotropic magnetoresistance property, and can be used as an alternative to the existing magnetic materials in anisotropic magnetoresistance sensors.

WANG CHAO (CN)
GUO JING (CN)
DIAO DONGFENG (CN)

PCT/CN2018/102904

January 23, 2020

August 29, 2018

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UNIV SHENZHEN (CN)

H01L41/12; H01L41/20

CN105980872A	2016-09-28
CN104617177A	2015-05-13
CN107334464A	2017-11-10
CN103938170A	2014-07-23

XUE, PEIDONG ET AL.: "ECR Sputtering and Electron/ion Alternative Irradiation for Multilayer Carbon Films Fabrication with Tunable Layer Thickness", SURFACE & COATINGS TECHNOLOGY, vol. 296, 6 April 2016 (2016-04-06), pages 26 - 32, XP029532795, ISSN: 0257-8972, DOI: 20190404150134X
XUE, PEIDONG ET AL.: "ECR Sputtering and Electron/ion Alternative Irradiation for Multilayer Carbon Films Fabrication with Tunable Layer Thickness", SURFACE & COATINGS TECHNOLOGY, vol. 296, 6 April 2016 (2016-04-06), pages 26 - 32, XP029532795, ISSN: 0257-8972, DOI: 20190404150034Y

JOHNSON INTELLECTUAL PROPERTY AGENCY (SHENZHEN) (CN)

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