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Patent Searching and Data


Title:
GRAPHITE HEATER FOR PRODUCTION OF MONOCRYSTAL, AND MONOCRYSTAL PULLING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/142493
Kind Code:
A1
Abstract:
The present invention provides a monocrystal production graphite heater that is used for producing a monocrystal by the Czochralski process and that has a cylindrical heat generator and a terminal part connected to the heat generator to supply electricity. The graphite heater is characterized in that: the heat generator has a plurality of upper slits extending downward from the upper end of the heat generator and a plurality of lower slits extending upward from the lower end of the heat generator, the upper and lower slits being alternately provided; by having the upper and lower slits, a height region between the terminal ends of the upper slits and the terminal ends of the lower slits is divided into a plurality of heat generation slit sections; the maximum cross-sectional area of the heat generator in a joint region between the terminal part and a heat generation slit section to which the terminal part is connected is 1.1-6.0 times as large as the cross-sectional area of said heat generation slit section. This provides a monocrystal production graphite heater that can generate a more uniform temperature distribution in the circumferential direction of the heater than that of conventional heaters, and reduce the frequency of occurrence of dislocation.

Inventors:
IWASAKI Atsushi (Shin-Etsu Handotai Co. Ltd., 13-50, Kitago 2-chome, Echizen-sh, Fukui 25, 〒9158525, JP)
TAKEYASU Shinobu (Shin-Etsu Handotai Co. Ltd., 13-50, Kitago 2-chome, Echizen-sh, Fukui 25, 〒9158525, JP)
Application Number:
JP2018/043314
Publication Date:
July 25, 2019
Filing Date:
November 26, 2018
Export Citation:
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Assignee:
SHIN-ETSU HANDOTAI CO., LTD. (2-1 Ohtemachi 2-chome, Chiyoda-ku Tokyo, 04, 〒1000004, JP)
International Classes:
C30B15/14; C30B29/06; F27B14/14; H05B3/14; H05B3/40
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (1st Shitaya Bldg. 8F, 6-11 Ueno 7-chome, Taito-k, Tokyo 05, 〒1100005, JP)
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