Title:
GRATING STRUCTURAL MEMBER AND MANUFACTURING METHOD THEREFOR, GRATING STRUCTURE TEMPLATE AND ASSOCIATED DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/188824
Kind Code:
A1
Abstract:
A grating structural member (210), a grating structure template (300), a diffractive optical waveguide (21) comprising the grating structural member (210), an electronic device (100) comprising the diffractive optical waveguide (21), and a method for manufacturing the grating structural member (210). The manufacturing method comprises: forming a first protrusion (a) on a substrate (216); scribing a plurality of first grating lines (212a) on a surface of the first protrusion (a) facing away from the substrate (216) by means of a mechanical scribing process, so as to form a first grating (212); forming a second protrusion (b) on a surface of the substrate (216) that is provided with the first protrusion (a); and scribing a plurality of second grating lines (213a) on a surface of the second protrusion (b) facing away from the substrate (216) by means of a mechanical scribing process, so as to form a second grating (213), wherein projections of extended lines of the second grating lines (213a) on the substrate (216) partially overlap with the projection of the first grating (212) on the substrate (216), and the distance from a bottom wall of each of the grooves forming the second grating lines (213a) to the substrate (216) is greater than or equal to the thickness of the first protrusion (a). By means of the manufacturing method, a grating structural member (210) with a desirable light transmission effect can be obtained.
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Inventors:
DENG ZHUOYONG (CN)
Application Number:
PCT/CN2022/080067
Publication Date:
September 15, 2022
Filing Date:
March 10, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G02B5/18; G02B27/01
Foreign References:
| CN106842397A | 2017-06-13 | |||
| CN108152874A | 2018-06-12 | |||
| CN1786751A | 2006-06-14 | |||
| CN103543485A | 2014-01-29 | |||
| CN104884373A | 2015-09-02 | |||
| CN103257383A | 2013-08-21 |
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
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