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Patent Searching and Data


Title:
GRID, PRODUCTION METHOD THEREFOR AND ION BEAM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/147232
Kind Code:
A1
Abstract:
Provided is a grid that is readily machined, wherein the likelihood of a protruding portion of carbon fiber being formed on the wall surface of a hole during machining of the hole is low. The plate-shaped grid (200) has holes (202), the grid (200) comprising a carbon/carbon composite containing carbon fibers, as materials, disposed in random orientations in the direction of the plane of the grid (200). The holes (202) of the grid (200) are formed in such a manner as to cut-off the carbon fibers.

Inventors:
TSUJIYAMA MASASHI (JP)
NAKAGAWA YUKITO (JP)
YASUMATSU YASUSHI (JP)
Application Number:
PCT/JP2015/005851
Publication Date:
September 22, 2016
Filing Date:
November 25, 2015
Export Citation:
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Assignee:
CANON ANELVA CORP (JP)
International Classes:
H01J37/04; H01J27/16; H01J37/08
Foreign References:
US5548953A1996-08-27
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
Okabe 讓 (JP)
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