Title:
GRINDING APPARATUS AND GRINDING METHOD
Document Type and Number:
WIPO Patent Application WO/2022/065113
Kind Code:
A1
Abstract:
This grinding apparatus comprises a plurality of chucks, a tool driving unit, a table, and a table cover. The chuck holds a substrate. The tool driving unit drives a grinding tool being abutted on the substrate. The table holds the plurality of chucks around the rotation axis thereof and rotates around the rotation axis. The table cover rotates together with the table. The table cover has a slope section that slopes downward in proportion to the distance from the rotation axis. The grinding apparatus comprises a nozzle. The nozzle positioned between the top point of the slope section and the chucks supplies a washing liquid to the slope section.
Inventors:
KODAMA MUNEHISA (JP)
Application Number:
PCT/JP2021/033582
Publication Date:
March 31, 2022
Filing Date:
September 13, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B24B55/06; B24B7/00; B24B7/04; B24B49/04; H01L21/304
Foreign References:
| JP2013188813A | 2013-09-26 | |||
| JP2019192846A | 2019-10-31 | |||
| JP2018085401A | 2018-05-31 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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