Title:
GRIPPER AND METHOD FOR OPERATING THE SAME
Document Type and Number:
WIPO Patent Application WO2004056678
Kind Code:
A3
Abstract:
The invention relates to a gripper for handling frames (2) that are covered with a film (3) that is intended for the transport of wafers (6). The gripper comprises at least two flat fingers (10) that carry flattened finger tips (8). This construction allows to insert the gripper between two frames (2) that are mounted in a cassette (9) without complication. The fingers (10) support in subsections both the frame (2) and the film (3). The film is attached to the frame due to the suction effect exerted by vacuum openings (5) configured on the frame, thereby fixating the film on the gripper
Inventors:
GERHARD DETLEF (DE)
LECHNER JOHANNES (DE)
RENNER MARTIN (DE)
LECHNER JOHANNES (DE)
RENNER MARTIN (DE)
Application Number:
PCT/DE2003/003987
Publication Date:
December 09, 2004
Filing Date:
December 04, 2003
Export Citation:
Assignee:
SIEMENS AG (DE)
GERHARD DETLEF (DE)
LECHNER JOHANNES (DE)
RENNER MARTIN (DE)
GERHARD DETLEF (DE)
LECHNER JOHANNES (DE)
RENNER MARTIN (DE)
International Classes:
B65G47/91; H01L21/673; H01L21/677; H01L21/68; B65G; (IPC1-7): H01L21/68; H01L21/677; H01L21/673
Domestic Patent References:
| WO1999062107A1 | 1999-12-02 |
Foreign References:
| US20030133776A1 | 2003-07-17 | |||
| DE4304301A1 | 1994-08-18 | |||
| EP1233442A2 | 2002-08-21 | |||
| US4904012A | 1990-02-27 | |||
| US6336787B1 | 2002-01-08 |
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