GROUND CLAMPING UNIT AND SUBSTRATE SUPPORT ASSEMBLY COMPRISING SAME

Title:

GROUND CLAMPING UNIT AND SUBSTRATE SUPPORT ASSEMBLY COMPRISING SAME

Document Type and Number:

WIPO Patent Application WO/2018/062710

Kind Code:

A1

Abstract:

A ground clamping unit for grounding a hollow member having a hollow and a ground load mounted in the hollow comprises: a clamping body having a penetration groove so as to encompass an external part of the ground load; an elastic connection part elastically making contact with the inside of the hollow member in the hollow and connected to the clamping body; and a fastening part for fastening the elastic connection part to the clamping body. Therefore, the clamping unit can tightly and electrically connect the ground load and the hollow member.

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Inventors:

JUNG CHUL HO (KR)
CHOI JIN YOUNG (KR)
LEE JU SUNG (KR)

Application Number:

PCT/KR2017/009729

Publication Date:

April 05, 2018

Filing Date:

September 05, 2017

Export Citation:

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Assignee:

MICO CO LTD (KR)

International Classes:

H01J37/32; C23C14/50; C23C16/458; H01L21/02; H01L21/687

Foreign References:

US20070113785A1	2007-05-24
KR20090011625A	2009-02-02
JP2005175368A	2005-06-30
KR101208700B1	2012-12-06
US20070113786A1	2007-05-24

Attorney, Agent or Firm:

LEE, Dong Gun (KR)

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