GROUP 5 METAL COMPOUND, PREPARATION METHOD THEREFOR, FILM DEPOSITION PRECURSOR COMPOSITION COMPRISING SAME, AND FILM DEPOSITION METHOD USING SAME

Title:

GROUP 5 METAL COMPOUND, PREPARATION METHOD THEREFOR, FILM DEPOSITION PRECURSOR COMPOSITION COMPRISING SAME, AND FILM DEPOSITION METHOD USING SAME

Document Type and Number:

WIPO Patent Application WO/2018/048124

Kind Code:

A1

Abstract:

The present invention relates to: a novel group 5 metal compound; a preparation method for the group 5 metal compound; a group 5 metal-containing film deposition precursor composition comprising the group 5 metal compound; and a group 5 metal-containing film deposition method using the group 5 metal-containing film deposition precursor composition.

More Like This:

JPH09500899	[Title of the Invention] Tris (isonitrile) copper ( I ) sulfate for producing a radionuclide complex
WO/2006/132107	NIOBIUM 2-ETHYLHEXANOATE DERIVATIVE, PROCESS FOR PRODUCING THE DERIVATIVE, ORGANIC ACID METAL SALT COMPOSITION CONTAINING THE DERIVATIVE, AND PROCESS FOR PRODUCING THIN FILM FROM THE COMPOSITION
WO/2001/032668	THERMOSENSITIVE CYCLOTRIPHOSPHAZENE DERIVATIVES AND A PREPARATION METHOD THEREOF

Inventors:

HAN WON SEOK (KR)
PARK MYEONG-HO (KR)
KIM DAE-YOUNG (KR)
CHOI JUN HWAN (KR)

Application Number:

PCT/KR2017/009188

Publication Date:

March 15, 2018

Filing Date:

August 23, 2017

Export Citation:

Click for automatic bibliography generation Help

Assignee:

UP CHEMICAL CO LTD (KR)

International Classes:

C07F9/00; C23C16/18; C23C16/34; C23C16/40; C23C16/455; H01L21/02; H01L21/28; H01L21/285

Foreign References:

KR20100060481A	2010-06-07
KR20110041498A	2011-04-21
KR20120102641A	2012-09-18
KR20130078965A	2013-07-10

Other References:

HERRMANN, W. A. ET AL.: "First Amido-functionalized Niobium and Tantalum Complexes of the Ansa-structural Type: Synthesis and Photochemical Si-N Bond Cleavage", JOURNAL OF ORGANOMETALLIC CHEMISTRY, vol. 506, 1996, pages 357 - 361, XP004092813

Attorney, Agent or Firm:

MAPS INTELLECTUAL PROPERTY LAW FIRM (KR)

Download PDF:

View/Download PDF PDF Help

Previous Patent: ANTENNA DEVICE AND METHOD FOR OPERATING ANTENNA

Next Patent: GAS SPRAYING APPARATUS FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS