Title:
GROWTH OF IN-SITU THIN FILMS BY REACTIVE EVAPORATION
Document Type and Number:
WIPO Patent Application WO2005089092
Kind Code:
A3
Abstract:
A method of forming MgB
Inventors:
MOECKLY BRIAN HAROLD (US)
RUBY WARD S (US)
RUBY WARD S (US)
Application Number:
PCT/US2004/038372
Publication Date:
February 16, 2006
Filing Date:
November 16, 2004
Export Citation:
Assignee:
SUPERCONDUCTOR TECH (US)
MOECKLY BRIAN HAROLD (US)
RUBY WARD S (US)
MOECKLY BRIAN HAROLD (US)
RUBY WARD S (US)
International Classes:
C23C14/06; C23C14/24; C23C14/56; H01C1/00; H01L39/24; (IPC1-7): C23C16/00; C23C14/24; C04B35/58; H01C1/00; H01L39/24
Foreign References:
| US5423914A | 1995-06-13 | |||
| US6630427B2 | 2003-10-07 | |||
| US20010036214A1 | 2001-11-01 |
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