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Title:
GYRO SENSOR AND COMPOSITE SENSOR COMPRISING GYRO SENSOR
Document Type and Number:
WIPO Patent Application WO/2014/083843
Kind Code:
A1
Abstract:
Detection weights (32, 33), which are arranged in the x-axis direction in an external driving weight (31), are disposed in a gyro sensor, and the detection weights (32, 33) are coupled by a coupling spring (44). Thus, an in-phase mode resonance frequency (fin) and an anti-phase mode resonance frequency (fanti) can be separated by coupling both detection weights (32, 33) by the coupling spring (44). As a result, a gyro sensor can be achieved wherein output error when subjected to an impact can be suppressed and angular velocity can be detected more accurately.

Inventors:
JOMORI TOMOYA (JP)
TSUCHIYA TOSHIYUKI (JP)
Application Number:
PCT/JP2013/006956
Publication Date:
June 05, 2014
Filing Date:
November 27, 2013
Export Citation:
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Assignee:
DENSO CORP (JP)
UNIV KYOTO (JP)
International Classes:
G01C19/5712; G01C19/5747; H01L29/84
Domestic Patent References:
WO2012004825A12012-01-12
Foreign References:
JP2011053185A2011-03-17
JP2000509812A2000-08-02
JP2009529666A2009-08-20
JP2008514968A2008-05-08
JP2012145493A2012-08-02
JPH1010148A1998-01-16
Attorney, Agent or Firm:
KIN, Junhi (JP)
Gold Junki (JP)
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